resistplasmaashingsystem等离子体抗蚀剂灰化系统
resistprocessingequipment抗蚀剂处理设备
resiststripper抗蚀剂剥离液
resiststrippingsystem抗蚀剂剥离系统
resisttemperaturecontrol抗蚀剂温度控制
resistthermalstability抗蚀剂热稳定性
resistthicknessuniformity抗蚀剂膜厚均质性
resistanceheadingfurnace电阻加热炉
resistanceheatingelement电阻加热元件
resistanceheatingevaporationsystem电阻加热真控蒸镀系统
resistanceheatingmethod电阻加热法
resistivity电阻系数
resolution解析度，析像清晰度
resolvingaperture监别孔隙
retarder阻凑剂
reticlealignment标线片对准
reticleblind标线片遮帘
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